Coating system and method for coating, as well as

专利名称：Coating system and method for coating, as

well as coated articles

发明人：Christoph Moelle,Lars Bewig,Thomas

Kuepper

申请号：US11937279申请日：20071108

公开号：US20080113109A1公开日：20080515

专利附图：

摘要：In the case of CVD methods, comprising PECVD and PICVD methods, the aim ofthe invention is to improve the impurity-free and, as far as possible, temporally and

quantitatively precise feeding of process gases for the targeted layer systems. To thisend, the invention provides a coating system and a method for coating articles withalternating layers, in the case of which process gases are introduced in an alternatingfashion into a gas mixing point and mixed with a further gas and led to the reactionchamber, in which the deposition is carried out by producing a plasma.

申请人：Christoph Moelle,Lars Bewig,Thomas Kuepper

地址：Mainz DE,Bad Gandersheim DE,Bad Gandersheim DE

国籍：DE,DE,DE

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