Vacuum plants for coating thin coatings

专利名称：Vacuum plants for coating thin coatings发明人：ハフロフ ヨウヘン アレクサンドロヴィチ,ミアス

ニコフ カンスタンツィン エヴゲニエヴィチ,リンジン－ロン

申请号：JP2019000611申请日：20190222公开号：JP3221883U公开日：20190627

专利附图：

摘要：Problem to be solved: to provide a vacuum plant for coating a thin film coating.Solution Attached to frameA technical device 3 is provided.At least one processing

chamberFrom the loading \\/ stacking positionAttached to a transport system configuredto move to an operating position below the processing chamberLoad lock chamberToapply a thin film coatingA substrate holder 5 for placing a substrate thereon;A substrateholder rotatable around its axisA supply device 6 for transferring a substrate holderfrom a load lock chamber to a processing chamberLocated between the chambersAvacuum gate 7 configured to divide the internal volume of the load lock chamber and theprocessing chamberIncludes processing and load lock chamber docking devicesTheupper portion of the processing chamberTo fix the substrate holderAndA clamp 8 isarranged to rotate it around its axis.Diagram

申请人：オプシチェストボ エス オグラニチェンノイ オトヴェストヴェンノストユ “イゾヴァク テクノロジー”

地址：ベラルーシ国 ２２００４０ ミンスク エム． ボグダノヴィチャ ウーエリ １５５－９０７

国籍：BY

代理人：特許業務法人三枝国際特許事務所

更多信息请下载全文后查看