INTERFEROMETRIC ANALYSIS OF SURFACES

专利名称：INTERFEROMETRIC ANALYSIS OF SURFACES发明人：DE GROOT, Peter, J.申请号：EP04788766.6申请日：20040915公开号：EP16932B1公开日：20150128

摘要：A method for determining a spatial property of an object includes obtaining ascanning low coherence interference signal from a measurement object that includes twoor more interfaces. The scanning low coherence interference signal includes two or moreoverlapping low coherence interference signals, each of which results from a respectiveinterface. Based on the low coherence interference signal, a spatial property of at leastone of the interfaces is determined. In some cases, the determination is based on asubset of the low coherence interference signal rather than on the entirety of the signal.Alternatively, or in addition, the determination can be based on a template, which may beindicative of an instrument response of the interferometer used to obtain the lowcoherence interference signal.

申请人：ZYGO CORP

地址：US

国籍：US

代理机构：Epping - Hermann - Fischer

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