Image viewing method for microstructures and defec

专利名称：Image viewing method for microstructures

and defect inspection system using it

发明人：Shigeru Matsui,Kei Shimura申请号：US11243188申请日：20051005

公开号：US20060072106A1公开日：20060406

专利附图：

摘要：A non-polarization beam splitter is used for splitting optical paths of anillumination system and an image formation system. MTF characteristics independent ofan orientation of a pattern on a sample is obtained by illumination with a circularly-

polarized light by combining a polarizer and a λ/4 plate. A partial polarizer is put in theimage formation system immediately after the non-polarization beam splitter, and high-order diffraction lights are taken in with the maximum efficiency and the transmissionefficiency of the zero-order light is controlled to improve high frequency part of MTF.

申请人：Shigeru Matsui,Kei Shimura

地址：Hitachinaka JP,Mito JP

国籍：JP,JP

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